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Adjust-at-the-Tank Purge System

Pressure Flow Regulator

Adjust-at-the-Tank systems feature a Cylinder/Dewar (source) mounted all-in-one Pressure and Flow Regulator. Purge gas flow rate is adjustable from 0 to 70 SCFM and is clearly indicated on the built-in flowmeter. Teflon tube connects pressure/flow regulator to chamber purge inlet tube or thermal platform cover. For gas inlet source pressure up to 3000 psi (206 bar) using standard CGA580 nitrogen connection.

To Learn more about Purge Systerms Click Here

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