The Adjust-at-Point of Use system features a Cylinder/Dewar mounted Pressure
Regulator with a separate adjustable Flowmeter/Regulator that can be located
where you work. Purge gas flow rate is adjustable at the flowmeter from 0 to
240 SCFM. Flowmeter/Regulator is typically mounted next to the controller,
but can be placed about anywhere. Includes tubing to connect all components
to chamber purge inlet tube, or thermal platform cover. For gas inlet
pressure up to 3000 psi (206 bar) using standard CGA580 nitrogen connection.
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